Samsung will also pay 503 million euros for a 3 percent equity stake in ASML.
ASML, based in the Netherlands, has already signed up Intel Corp (INTC.O) and TSMC (2330.TW) in recent weeks with similar deals to fund and fast-track its research.
In July, the Dutch company said it had approached its three biggest customers - Intel, TSMC, and Samsung Electronics - to help fund its R&D and invest in up to 25 percent of its shares. ($1 = 0.7989 euros) (Reporting by Gilbert Kreijger; Editing by Sara Webb)
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